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Nanoplas Plasma-Therm

SALES STATUS: Available

Nanoplas Plasma-Therm

IBE SMT Inventory ID : 260828-006
Nanoplas Serial Number : SN21
Vintage : 2010

Details

Plasma Asher/ Photoresist Stripper

Specifications ( See Details above for installed options )

Plasma-Therm acquired the plasma processing technology and assets of Nanoplas France in November 2015. This strategic acquisition integrated Nanoplas' proprietary technology into Plasma-Therm's semiconductor equipment portfolio, strengthening its offerings for advanced packaging and microelectronics manufacturing.

Core Technologies & Applications
The relationship between Nanoplas and Plasma-Therm centers on specific high-density plasma applications:

• HDRF™ (High Density Radical Flux): The centerpiece of the acquisition was Nanoplas' Odyssey HDRF technology. This system provides low-temperature, damage-free photoresist stripping and plasma ashing, making it highly effective for processing temperature-sensitive substrates.

• Bosch Polymer Removal: HDRF technology proved uniquely capable of removing the robust fluoropolymer materials left behind during deep reactive ion etching (DRIE) via the Bosch process.

• Legacy Systems: The transaction incorporated Nanoplas’ established tool line, most notably the semi-automatic DSB 6000 and DSB 9000 series, which are commonly utilized in R&D and high-mix volume production markets. Pre-owned or refurbished variants of these systems continue to circulate under the Plasma-Therm Nanoplas DS-6000 designation.

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IBE SMT Equipment, LLC
318 Corporate Woods Drive, Magnolia, TX 77354
Toll Free: (800) 353-6942 Phone: (281) 259-9660 Fax: (281) 259-8863

Nanoplas Plasma-Therm, plasma, stripping, plasma ashing, removal, industrial, used - IBE ID: 260828-006
All Equipment is subject to prior sale - All prices and terms are subject to change without notice. © Copyright 2007. IBE SMT Equipment, LLC All Rights Reserved.

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Nanoplas Plasma-Therm

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